Learning-Assisted Congestion-Aware Route Scheduling for Semiconductor Fab Material Control Systems

Hao Yin; Meiqi Tu; Anbang Liu; Shaochong Lin; Max Z. J. Shen

Learning-Assisted Congestion-Aware Route Scheduling for Semiconductor Fab Material Control Systems

Hao Yin, Meiqi Tu, Anbang Liu, Shaochong Lin, Max Z. J. Shen

arXivarxiv/2608.30520Aug 31, 2026cs.AIscore 0

Automated material handling systems in semiconductor fabs are operated by a material control system (MCS) that must schedule a relay route for every transport command online, before execution. This is a data-driven scheduling problem in which route cost is dominated in the upper tail by queueing at heterogeneous, partially observable relay equipment, so route selection requires estimating both delivery time and congestion risk at the decision moment. This paper proposes a transport-network-aware dynamic congestion representation (TN-DCR). Built on a static directed transport graph induced by…

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